Ceramic surface modification by a keV ion irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 740-744

  Choi, W K ^a   Choi, S C ^a   Jung, H J ^a   Koh, S K ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

Ceramic surface modification; Functional layer; KeV ion beam; Metal film adhesion

Indexed keywords

ADHESION; ALUMINUM COMPOUNDS; CHEMICAL BONDS; ION BOMBARDMENT; METALLIC FILMS; SILICON NITRIDE; SINGLE CRYSTALS; SURFACE TREATMENT;

CERAMIC SURFACE MODIFICATION;

CERAMIC MATERIALS;

EID: 0033513827     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00848-9     Document Type: Article

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