Formation of new surface layers on ceramics by ion assisted reaction

Journal of Materials Research

Volumn 13, Issue 9, 1998, Pages 2560-2564

  Koh, S K ^a   Son, Y B ^a   Gam, J S ^a   Han, K S ^a   Choi, W K ^a   Jung, H J ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ALUMINA; ARGON; BOND STRENGTH (MATERIALS); CHEMICAL BONDS; COPPER; ION BOMBARDMENT; METALLIC FILMS; NITRIDES; OXIDES; SPUTTER DEPOSITION;

ALUMINUM NITRIDE; ALUMINUM OXIDE; ION ASSISTED REACTIONS; ION-BEAM SPUTTERING;

CERAMIC MATERIALS;

EID: 0032163328     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1998.0357     Document Type: Article

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