Using convective flow splitting for the direct printing of fine copper lines

Applied Physics Letters

Volumn 77, Issue 13, 2000, Pages 2063-2065

  Cuk, Tanja ^a   Troian, Sandra M ^a   Hong, Cheong Min ^a   Wagner, Sigurd ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000933295     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1311954     Document Type: Article

References (26)

1. X. N. Xia and G. M. Whitesides, Annu. Rev. Mater. Sci. 28, 153 (1998) and references therein.
2. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, J. Vac. Sci. Technol. B 14, 4129 (1996) and references therein.
3. A. Kumar and G. Whitesides, Appl. Phys. Lett. 63, 2002 (1993).
4. R. J. Jackman, J. L. Wilbur, and G. M. Whitesides, Science 269, 664 (1995).
5. Y. Mikami, Y. Nagae, Y. Mori, K. Kuwabara, T. Saito, H. Hayama, H. Asada, Y. Akimoto, M. Kobayashi, S. Okazaki, K. Asaka, H. Matsui, K. Nakamura, and E. Kaneko, IEEE Trans. Electron Devices 41, 306 (1994).
6. H. A. Biebuyck, N. B. Larsen, E. Delamarche, and B. Michel, IBM J. Res. Dev. 41, 159 (1997).
7. L. Libioulle, A. Bietsch, H. Schmid, B. Michel, and E. Delamarche, Langmuir 15, 300 (1999).
8. J. P. Bourgoin and S. Palacin, Langmuir 14, 3967 (1998).
9. C. M. Hong and S. Wagner, Mater. Res. Soc. Symp. Proc. 558, 387 (2000).
10. C. M. Hong, H. Gleskova, and S. Wagner, Mater. Res. Soc. Symp. Proc. 471, 35 (1997).
11. R. F. Probstein, Physicochemical Hydrodynamics, 2nd ed. (Wiley, New York, 1994). Chap. 10 and references therein.
12. E. Adachi, A. S. Dimitrov, and K. Nagayama, Langmuir 11, 1057 (1995).
13. E. Parisse and C. Allain, J. Phys. II 6, 1111 (1996).
14. J. Conway, H. Korns, and M. R. Fisch, Langmuir 13, 426 (1997).
15. R. D. Deegan, O. Bakajin, T. F. Dupont, G. Huber, S. R. Nagel, and T. A. Witten, Nature (London) 389, 827 (1997).
16. S. Maenosono, C. D. Dushkin, S. Saita, and Y. Yamaguchi, Langmuir 15, 957 (1999).
17. R. D. Deegan, Phys. Rev. E 61, 475 (2000).
18. J. C. Duh and W. J. Yang, Numer. Heat Transfer, Part A 16, 129 (1989).
19. H. Niazmand, B. D. Shaw, H. A. Dwyer, and I. Aharon, Combust. Sci. Technol. 103, 219 (1994).
20. A. T. Shih and C. M. Megaridis, Int. J. Heat Mass Transf. 39, 247 (1995).
21. N. Zhang and W. J. Yang, Trans. ASME 104, 656 (1982).
22. N. Zhang and W. J. Wang, Exp. Fluids 1, 101 (1983).
23. N. Zhang and W. J. Wang, Trans. ASME 106, 652 (1984).
24. 6. The flow is therefore completely driven by Marangoni stresses.
25. According to Zhang and Wang (1982). chloroform is a "substable" solvent. During evaporation, a droplet of substable liquid will develop a distinct outer rim with crosswise striations. These striations result from a secondary instability which produces polygonal Bénard-Marangoni cells, as depicted in region II of Fig. 3. These remnant striations, which appear as black hatchmarks in Fig. 1(b), can be eliminated by using "stable" solvents or longer annealing times.
26. T. E. Faber, Fluid Dynamics for Physicists (Cambridge University Press, Cambridge, 1995), Chap. 8.