Epitaxial Si1-yCy alloys: The role of surface and gas phase reactions

Journal of Applied Physics

Volumn 85, Issue 2, 1999, Pages 1240-1242

  Mocuta, A C ^a   Greve, D W ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000917364     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369350     Document Type: Article

References (14)

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10. Calculating carbon concentration in this way is consistent with much of the previous work. Some authors report in recent work deviations from Vegard's law in the silicon-carbon system [P. C. Kelires, Phys. Rev. B 55, 8785 (1997);
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