On the prediction of electromigration voiding using stress-based modeling

Journal of Applied Physics

Volumn 87, Issue 8, 2000, Pages 4039-4041

  Duan, Q F ^a   Shen, Y L ^a  

^a MSC01 1070   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000898275     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372452     Document Type: Article

References (16)

1. I. A. Blech, J. Appl. Phys. 47, 1203 (1976); Acta Mater. 46, 3717 (1998).
2. I. A. Blech, J. Appl. Phys. 47, 1203 (1976); Acta Mater. 46, 3717 (1998).
3. M. A. Korhonen, P. Borgesen, K. N. Tu, and C.-Y. Li, J. Appl. Phys. 73, 3790 (1993).
4. C. A. Ross and J. E. Evetts, Ser. Metall. 21, 1077 (1987).
5. M. Scherge, C. L. Bauer, and W. W. Mullins, Acta Metall. Mater. 43, 3525 (1995).
6. J. R. Lloyd, Semicond. Sci. Technol. 12, 1177 (1997).
7. B. D. Knowlton, J. J. Clement, and C. V. Thompson, J. Appl. Phys. 81, 6073 (1997).
8. B. D. Knowlton and C. V. Thompson, J. Mater. Res. 13, 1164 (1998).
9. Y. J. Park and C. V. Thompson, J. Appl. Phys. 82, 4277 (1997).
10. Y. Liu, C. L. Cox, and R. J. Diefendorf, J. Appl. Phys. 83, 3600 (1998).
11. Y.-C. Joo, S. P. Baker, and E. Arzt, Acta Mater. 46, 1969 (1998).
12. Y.-C. Joo, C. V. Thompson, S. P. Baker, and E. Arzt, J. Appl. Phys. 85, 2108 (1999).
13. Z. Li, C. L. Bauer, S. Mahajan, and A. G. Milnes, J. Appl. Phys. 72, 1821 (1992).
14. A. G. Milnes and C. L. Bauer, Solid-State Electron, 34, 741 (1991).
15. C. A. Minor, Y. L. Guo, and Y.-L. Shen. Ser. Mater. 41, 347 (1999).
16. Y.-L. Shen, Y. L. Guo, and C. A. Minor, Acta Mater, (in press).