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Volumn 46, Issue 6, 1998, Pages 1969-1979

Electromigration in single-crystal aluminum lines with fast diffusion paths made by nanoindentation

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL ORIENTATION; CURRENT DENSITY; DIFFUSION IN SOLIDS; ELECTRIC CONDUCTORS; ELECTROMIGRATION; NANOTECHNOLOGY; NUCLEATION; PLASTIC DEFORMATION; SINGLE CRYSTALS; SUBSTRATES;

EID: 0032010569     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6454(97)00427-8     Document Type: Article
Times cited : (12)

References (30)
  • 10
    • 0030381115 scopus 로고    scopus 로고
    • ed. W. F. Filter, J. J. Clement, A. S. Oates, R. Rosenberg and P. M. Lenahan. Mater. Res. Soc. Symp. Proc.
    • Kang, S. H., Génin, F. Y., Kim, C. and Morris, J. W., in Materials Reliability in Microelectronics VI, Vol. 428, ed. W. F. Filter, J. J. Clement, A. S. Oates, R. Rosenberg and P. M. Lenahan. Mater. Res. Soc. Symp. Proc., 1996, p. 255.
    • (1996) Materials Reliability in Microelectronics VI , vol.428 , pp. 255
    • Kang, S.H.1    Génin, F.Y.2    Kim, C.3    Morris, J.W.4
  • 11
    • 0029510519 scopus 로고
    • ed. A. S. Oates, W. F. Filter, R. Rosenberg, A. L. Greer and K. Gadepally. Mater. Res. Soc. Symp. Proc.
    • Shih, W. C. and Greer, A. L., in Materials Reliability in Microelectronics V, Vol. 391, ed. A. S. Oates, W. F. Filter, R. Rosenberg, A. L. Greer and K. Gadepally. Mater. Res. Soc. Symp. Proc., 1995, p. 391.
    • (1995) Materials Reliability in Microelectronics V , vol.391 , pp. 391
    • Shih, W.C.1    Greer, A.L.2
  • 19
    • 0027914986 scopus 로고
    • ed. K. P. Rodbell, W. F. Filter, H. J. Frost and P. S. Ho. Mater. Res. Soc. Symp. Proc.
    • Knorr, D. B., in Materials Reliability in Microelectronics II, Vol. 309, ed. K. P. Rodbell, W. F. Filter, H. J. Frost and P. S. Ho. Mater. Res. Soc. Symp. Proc., 1993, p. 75.
    • (1993) Materials Reliability in Microelectronics II , vol.309 , pp. 75
    • Knorr, D.B.1
  • 21
    • 85033926377 scopus 로고
    • Ph.D. thesis, Massachussetts Institute of Technology
    • Joo, Y. -C., Ph.D. thesis, Massachussetts Institute of Technology, 1995.
    • (1995)
    • Joo, Y.-C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.