Dynamic modeling and vibration analysis of the atomic force microscope

Journal of Vibration and Acoustics, Transactions of the ASME

Volumn 123, Issue 4, 2001, Pages 502-509

  Fung, Rong Fong ^a   Huang, Shih Chien ^b  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^b CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000831068     PISSN: 10489002     EISSN: 15288927     Source Type: Journal    
DOI: 10.1115/1.1389084     Document Type: Article

References (12)

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2. Alexander, S., Hellemans, L., Marti, O., Schneri, J., Elings, V, Hansma, P. K., Longmire, M., and Gurely, J., 1989, “An Atomic-Resolution Atomic-Force Microscope Implemented Using an Optical Lever,” J. Appl. Phys., 65, pp. 164-167.
3. Itoh, T., and Suga, T., 1994, “Piezoelectric Sensor for Detecting Force Gradients in Atomic Force Microscopy,” Jpn. J. Appl. Phys., Part 1, 33, pp. 334-340.
4. Itoh, T., and Suga, T., 1994, “Piezoelectric Force Sensor for Scanning Force Microscopy,” Sens. Actuators A, 43, pp. 305-310.
5. Itoh, T., and Suga, T., 1996, “Self-Excited Force-Sensing Microcantilevers with Piezoelectric Thin Films for Dynamic Scanning Force Microscopy,” Sens. Actuators A, 54, pp. 477-481.
6. Basso, M., Giarre, L., Dahleh, M., and Mezic, I., 2000, “Complex Dynamics in a Harmonically Excited Lennard-Jones Oscillator: Microcantilever-Sample Interaction in Scanning Probe Microscopes,” ASME J. Dyn. Syst., Meas., Control, 122, pp. 240-245.
7. Ashhab, M., Salapaka, M. V., Dahleh, M., and Mezic, I., 1999, “Dynamical Analysis and Control of Microcantilever,” Automatica, 35, pp. 1663-1670.
8. Israelachvili, J. N., 1985, Intermolecular and Surface Forces, Academic Press, New York.
9. Cappella, B., and Dietler, G., 1999, “Force-Distance Curve by Atomic Force Microscopy,” Surf. Sci. Rep., 34, pp. 1-104.
10. Fung, R. F., Huang, J. S., and Jan, S. C., 2000, “Dynamic Analysis of a Piezothermoelastic Resonator with Various Shapes,” ASME J. Vibr. Acoust., 122, pp. 244-253.
11. Reddy, J. N., 1993, An Introduction to The Finite Element Method, McGraw-Hill, New York.
12. Spyrakos, C. C., 1994, Finite Element Modeling in Engineering Practice, West Virginia University Press, Morgantown, WV