Deformations in (Al,Ga)As epitaxial layers wafer bonded on dissimilar substrates

Journal of Applied Physics

Volumn 89, Issue 4, 2001, Pages 2173-2178

  Jenichen, B ^a   Kaganer, V M ^a   Riedel, A ^a   Kostial, H ^a   Gong, Q ^a   Hey, R ^a   Friedland, K ^a   Ploog, K H ^a  

^a PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000740755     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1342804     Document Type: Article

References (18)

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