X-ray reflectivity of ultrathin twist-bonded silicon wafers

Applied Physics Letters

Volumn 75, Issue 22, 1999, Pages 3509-3511

  Eymery, J ^a   Fournel, F ^a   Rieutord, F ^a   Buttard, D ^a   Moriceau, H ^b   Aspar, B ^b  

^a CEA GRENOBLE   (France)

^b CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001756376     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125371     Document Type: Article

References (10)

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