A novel dual-axial AFM cantilever with independent piezoresistive sensors for simultaneous detection of lateral and vertical forces

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 62, Issue , 1997, Pages 55-59

  Chui, Benjamin W ^a   Kenny, Thomas W ^a   Mamin, H Jonathon ^b   Terris, Bruce D ^b   Rugar, Daniel ^b  

^a STANFORD UNIVERSITY   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; PIEZOELECTRIC DEVICES; RESISTORS; SENSORS;

DUAL AXIAL ATOMIC FORCE MICROSCOPY CANTILEVERS; PIEZORESISTIVE SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 6944222755     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)

1. Bhushan, B., ed., 1997, Micro/Nanotribology and its Applications, NATO Advanced Science Institutes Series, Kluwer Academic Publishers, Boston.
2. Binnig, G., Quate, C.F., and Ch. Gerber, 1986, "Atomic Force Microscope," Phys. Rev. Lett. vol. 56, pp. 930-3.
3. Brugger, J., Burger, J., Binggeli, M., Imura, R., and de Rooij, N.F., 1995, "Lateral force measurements in a scanning force microscope with piezoresistive sensors," Tech. Digest of 8th Int'l Conf. on Solid State Sensors and Actuators, Stockholm, pp. 636-9.
4. Chui, B.W., Stowe, T.D., Kenny, T.W., Mamin, H.J., Terris, B.D., and Rugar, D., 1996, "Low-stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope," Appl. Phys. Lett. vol. 69, pp. 2767-9.
5. Gruetter, P., Mamin, H.J., and Rugar, D., 1995, "Magnetic Force Microscopy (MFM)" in Scanning Tunneling Microscopy II: Further applications and related scanning techniques, second edition, Wiesendanger, R., and Guntherodt, H-J., ed., Springer-Verlag, Berlin, pp. 151-207.
6. Kassing, R. and Oesterschulze, E., 1997, "Sensors for scanning probe microscopy" in Bhushan, 1997, pp.35-54.
7. Kawakatsu, H. and Saito, T., 1997, "An atomic force microscope with two optical levers for detection of the position of the tip end with three degrees of freedom" in Bhushan, 1997, pp. 55-60.
8. LAM TCP 9400 plasma etcher, Lam Research Corp., Fremont, California.
9. Mate, C.M., McClelland, G.M., Erlandsson, R., and Chiang, S., 1987, "Atomic-scale friction of a tungsten tip on a graphite surface," Phys. Rev. Lett. vol. 59, p.1942-5.
10. Ried, R. P., Mamin, H. J., Terris, B. D., Fan, L. S., and Rugar, D., 1997, "5 MHz, 2 N/m Piezoresistive AFM Cantilevers with INCISIVE Tips," Tech. Digest of 9th Int'l Conf. on Solid State Sensors and Actuators, Chicago, pp. 447-50.
11. Rugar, D. and Hansma, P.K., 1990, "Atomic Force Microscopy," Phys. Today, vol. 43, pp. 23-30.
12. Tortonese, M., Yamada, H., Barrett, R.C., and Quate, C.F., 1991, "Atomic force microscopy using a piezoresistive cantilever," Tech. Digest of 6th Int'l Conf. on Solid State Sensors and Actuators, San Francisco, pp. 448-51.