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Volumn 141, Issue 12, 1994, Pages 3593-3595
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Enhanced diffusion of dopants at concentrations near the solubility limit
a
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Author keywords
[No Author keywords available]
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Indexed keywords
DIFFUSION IN LIQUIDS;
NUMERICAL ANALYSIS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MODELS;
SOLUBILITY;
DOPANTS;
SOLUBILITY LIMIT;
SEMICONDUCTOR DOPING;
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EID: 0028726978
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.2059376 Document Type: Article |
Times cited : (18)
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References (14)
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