Analysis of contamination, hydrogen emission, and surface temperature variations using real time spectroscopic ellipsometry during p/i interface formation in amorphous silicon p-i-n solar cells

Applied Physics Letters

Volumn 74, Issue 24, 1999, Pages 3687-3689

  Fujiwara, H ^a,b   Koh, Joohyun ^a   Wronski, C R ^a   Collins, R W ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000706008     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123230     Document Type: Article

References (18)

1. W. Luft and Y. Tsuo, Hydrogenated Amorphous Silicon Deposition Processes (Marcel Dekker, New York, 1993).
2. N. Bernhard, G. H. Bauer, and W. H. Bloss, Prog. Photovoltaics 3, 149 (1995).
3. R. E. I. Schropp, J. D. Ouwens, M. B. von der Linden, C. H. M. ven der Werf, W. F. van der Weg, and P. F. A. Alkemade, Mater. Res. Soc. Symp. Proc. 297, 797 (1993).
4. H. Fujiwara, J. Koh, J. S. Burnham, C. R. Wronski, and R. W. Collins, Appl. Phys. Lett. 72, 2993 (1998).
5. J. Koh, Y. Lu, S. Kim, J. S. Burnham, C. R. Wronski, and R. W. Collins, Appl. Phys. Lett. 67, 2669 (1995).
6. H. Fujiwara, J. Koh, Y. Lee, C. R. Wronski, and R. W. Collins, J. Appl. Phys. 84, 2278 (1998).
7. I. An, Y. M. Li, H. V. Nguyen, and R. W. Collins, Rev. Sci. Instrum. 63, 3842 (1992).
8. R. W. Collins, Appl. Phys. Lett. 53, 1086 (1988).
9. Y. M. Li, I. An, H. V. Nguyen, C. R. Wronski, and R. W. Collins, Phys. Rev. Lett. 68, 2814 (1992).
10. R. A. Street, Phys. Rev. B 43, 2454 (1991).
11. L. Ley, in The Physics of Hydrogenated Amorphous Silicon II, edited by J. D. Joannopoulos and G. Lucovsky (Springer, Berlin, 1984), Vol. 56, p. 61.
12. G. E. Jellison, Jr. and F. A. Modine, Appl. Phys. Lett. 69, 371 (1996); 69, 2137 (1996).
13. G. E. Jellison, Jr. and F. A. Modine, Appl. Phys. Lett. 69, 371 (1996); 69, 2137 (1996).
14. R. A. Street, C. C. Tsai, J. Kakalios, and W. B. Jackson, Philos. Mag. B 56, 305 (1987).
15. W. Beyer, H. Wagner, and H. Mell, Solid State Commun. 39, 375 (1981).
16. T. Kamei, N. Hata, and A. Matsuda, J. Non-Cryst. Solids 198-200, 999 (1996).
17. A. Catalano and G. Wood, J. Appl. Phys. 63, 1220 (1988).
18. J. Koh, Y. Lee, H. Fujiwara, C. R. Wronski, and R. W. Collins, Appl. Phys. Lett. 73, 1526 (1998).