Real time spectroscopic ellipsometry characterization of structural and thermal equilibration of amorphous silicon-carbon alloy p layers in p-i-n solar cell fabrication

Journal of Applied Physics

Volumn 84, Issue 4, 1998, Pages 2278-2286

  Fujiwara, H ^a   Koh, Joohyun ^a   Lee, Yeeheng ^a   Wronski, C R ^a   Collins, R W ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000258395     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368361     Document Type: Article

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