Dose- and annealing-induced changes in the microstructure of buried SiNx: An x-ray absorption study

Journal of Applied Physics

Volumn 83, Issue 11, 1998, Pages 5804-5809

  Paloura, E C ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000690112     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367436     Document Type: Article

References (21)

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