Simulation of dislocations on the mesoscopic scale. II. Application to strained-layer relaxation

Journal of Applied Physics

Volumn 85, Issue 1, 1999, Pages 120-129

  Schwarz, K W ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000668939     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369430     Document Type: Article

References (16)

1. R. Beanland, D. J. Dunstan, and P. J. Goodhew, Adv. Phys. 45, 87 (1996).
2. P. M. Mooney, Mater. Sci. Eng., R. 17, 105 (1996).
3. Saturation means that the energy is at a minimum, and that new threading arms cannot propagate. It does not mean that all of the strain is cancelled by the dislocation fields. This occurs only in the limit of infinite layer thickness. See T. J. Gosling, J. R. Willis, R. Bullough, and S. C. Jain, J. Appl. Phys. 73, 8297 (1993).
4. E. A. Fitzgerald, Y. H. Xie, D. Monroe, P. J. Silverman, J. M. Kuo, A. R. Kortan, F. A. Thiel, and B. E. Weir, J. Vac. Sci. Technol. B 10, 1807 (1992).
5. G. P. Watson, E. A. Fitzgerald, Y. H. Xie, and D. Monroe, J. Appl. Phys. 75, 263 (1994).
6. B. S. Meyerson, K. J. Uram, and F. K. LeGoues, Appl. Phys. Lett. 53, 2555 (1988).
7. F. K. LeGoues, B. S. Meyerson, J. F. Morar, and P. D. Kirchner, J. Appl. Phys. 71, 4230 (1992).
8. F. K. LeGoues (private communication).
9. K. W. Schwarz and J. Tersoff, Appl. Phys. Lett. 69, 1220 (1996).
10. K. W. Schwarz, Phys. Rev. Lett. 78, 4785 (1997).
11. K. W. Schwarz and F. K. LeGoues, Phys. Rev. Lett. 79, 1877 (1997).
12. x layers, the configurations remain the same, but the directions of the dislocations should be reversed.
13. B. W. Dodson and J. Y. Tsao, Appl. Phys. Lett. 51, 1325 (1987).
14. R. Hull and J. C. Bean, Phys. Status Solidi A 138, 533 (1993).
15. L. B. Freund, J. Appl. Phys. 68, 2073 (1990).
16. F. K. LeGoues, Phys. Rev. Lett. 72, 876 (1994).