Mechanical behavior of a MEMS acoustic emission sensor

Materials Research Society Symposium - Proceedings

Volumn 444, Issue , 1997, Pages 209-214

  Bahr, D F ^a   Wright, J S ^a   Francis, L F ^a   Moody, N R ^a   Gerberich, W W ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC EMISSIONS; ANNEALING; DELAMINATION; ELASTIC MODULI; HARDNESS; HEAT TREATMENT; MECHANICAL PROPERTIES; PYROLYSIS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH; SENSORS;

ACOUSTIC EMISSION SENSOR; MULTILAYER NITRIDE BOTTOM ELECTRODE; NANOINDENTATION TECHNIQUES; THERMALLY GROWN SILICON DIOXIDE;

MICROELECTROMECHANICAL DEVICES;

EID: 0030706639     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)