The influence of ion beam sputtering on the composition of the near-surface region of silicon carbide layers

Fresenius' Journal of Analytical Chemistry

Volumn 365, Issue 1-3, 1999, Pages 195-198

  Ecke, G ^a   Kosiba, R ^a   Pezoldt, J ^a   Roßler H ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000616079     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002160051471     Document Type: Article

References (11)

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