Combined calculation of lens aberrations, space charge aberrations, and statistical Coulomb effects in charged particle optical columns

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3747-3752

  Jiang, X R ^a   Barth, J E ^a   Kruit, P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000611310     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588661     Document Type: Article

References (20)

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