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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3359-3363

Electrical and optical characteristics of etch induced damage in InGaAs

(2) Berg, E W a Pang, S W a

a University of Michigan (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000601685 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.590459 Document Type: Article

Times cited : (14)

References (15)

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