Pattern transfer on mask membranes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3572-3576

  Fisher, A H ^a   Engelstad, R L ^a   Lovell, E G ^a   Puisto, D M ^b  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b LOCKHEED MARTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000559539     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590308     Document Type: Article

References (5)

1. A. Fisher, R. Engelstad, and M. Laudon, Proc. SPIE 3048, 146 (1997).
2. A. Fisher, M. Laudon, R. Engelstad, E. Lovell, and F. Cerrina, J. Vac. Sci. Technol. B 15, 2249 (1997).
3. D. Puisto, IBM-Burlington, VT (private communications, 1997).
4. K. Cummings, W. Dauksher, W. Johnson, M. Laudon, and R. Engelstad, J. Vac. Sci. Technol. B 14, 4323 (1996).
5. S. Hector, Microelectron. Eng. 41/42, 25 (1998).