Pattern placement errors in mask membranes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2249-2254

  Fisher, A H ^a   Laudon, M F ^a   Engelstad, R L ^a   Lovell, E G ^a   Cerrina, F ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000769787     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589623     Document Type: Article

References (16)

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