A global basis function approach to DC glow discharge simulation

Physics Letters, Section A: General, Atomic and Solid State Physics

Volumn 243, Issue 3, 1998, Pages 142-150

  Lin, Yi Hung ^a   Adomaitis, Raymond A ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Collocation; Continuation; Global basis functions; Glow discharge; Plasma processing; Pseudospectral

Indexed keywords

DISCRETE EVENT SIMULATION; FUNCTIONS; GLOW DISCHARGES; PLASMA APPLICATIONS; PLASMA SHEATHS; POLYNOMIALS; TEMPERATURE DISTRIBUTION; VOLUME MEASUREMENT;

COLLOCATION; CONTINUATION; DISCRETIZATION METHOD; ELECTRON DIFFUSIVITY; GLOBAL BASIS FUNCTIONS; PLASMA SHEATH REGION; PSEUDOSPECTRAL; TEMPERATURE DEPENDENCE;

CONVERGENCE OF NUMERICAL METHODS;

EID: 0041853222     PISSN: 03759601     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0375-9601(98)00241-2     Document Type: Article

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