Design and fabrication of microactuators for high density data storage

IEEE Transactions on Magnetics

Volumn 32, Issue 3 PART 2, 1996, Pages 1855-1862

  Fan, Long Sheng ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DESIGN; ELECTRODES; ELECTROSTATICS; LINEARIZATION; MAGNETIC RECORDING; MICROELECTRONIC PROCESSING; SERVOMECHANISMS;

HIGH DENSITY DATA STORAGE; MAGNETIC RECORDING HEAD SLIDER; MICROACTUATORS;

MAGNETIC HEADS;

EID: 0030144809     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.492877     Document Type: Article

References (10)

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2. L.-S. Fan, S. J. Woodman, R. C. Moore, L. Crawforth, T. C. Reiley, M. A. Moser, "Batch-fabricated area-efficient milli-actuators", Technical Digest of Solid-Stae Sensor and Actuator Workshop, Hilton Head, SC, pp.38-42, June 1994.
3. L.-S. Fan, "Towards mN electro-and magneto-static microactuators," Proc. of the Workshop on Microtechnologies and Applications to Space Systems, NASA, Los Angels, USA, pp. 191-192, June 1993.
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8. [S] L.-S. Fan, S. J. Woodman, "Batch fabrication of mechanical platforms for high density data storage", Proc. of International Conference on Solid-State Sensors and Actuators, pp. 434-437, June 1995.
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10. S. J. Sherman, et al., "A low cost monolithic accelerometer: product/technology Update", Proc. of IEDM, pp. 501-504, Dec. 1992.