메뉴 건너뛰기




Volumn 37, Issue 3 SUPPL. B, 1998, Pages 1383-1390

Wafer bonding of InP to Si and its application to optical devices

Author keywords

Optoelectronic integrated circuits; Semiconductor lasers; Wafer bonding

Indexed keywords


EID: 0000508569     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.1383     Document Type: Article
Times cited : (25)

References (28)
  • 26
    • 0026900505 scopus 로고
    • Semiconductor Wafer Bonding
    • S. Bengtsson, "Semiconductor Wafer Bonding: J. Electron. Mater. 21 (1992) 841.
    • (1992) J. Electron. Mater. , vol.21 , pp. 841
    • Bengtsson, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.