High-resolution depth profiling of InxGa1-xAs/GaAs multiple quantum well structures by combination of secondary ion mass spectrometry and x-ray diffraction techniques

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2037-2045

  Gerardi, C ^a   Giannini, C ^a   Passaseo, A ^a   Tapfer, L ^a  

^a Centro Nazionale per la Ricerca e lo Sviluppo dei Materiali   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000428194     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (31)

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