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Diamond and Related Materials

Volumn 5, Issue 3-5, 1996, Pages 535-538

Growth of boron nitride thin films by tuned substrate RF magnetron sputtering

(4) Gimeno, S a Andujar J L a Bertran, E a Lousa, A a

a UNIVERSITY OF BARCELONA (Spain)

Author keywords

Boron nitride; Film growth; Magnetron sputtering; thin films; Tuned substrate

Indexed keywords

EID: 0008914379 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/0925-9635(96)80074-4 Document Type: Article

Times cited : (4)

References (17)

1
- 0041859772
- S.P.S. Arya and A. D'Amico, Thin Solid Films, 157 (1988) 207.
- (1988) Thin Solid Films , vol.157 , pp. 207
- Arya, S.P.S.¹ D'Amico, A.²

2
- 0004237796
- Trans Tech, Zürich
- J.J. Pouch and S.A. Alterovitz (eds.), Synthesis and Properties of Boron Nitride, Trans Tech, Zürich, 1990.
- (1990) Synthesis and Properties of Boron Nitride
- Pouch, J.J.¹ Alterovitz, S.A.²

3
- 21544436913
- H. Saitoh and W.A. Yarbrough, Diamond Relat. Mater., 1 (1992) 137.
- (1992) Diamond Relat. Mater. , vol.1 , pp. 137
- Saitoh, H.¹ Yarbrough, W.A.²

4
- 0041358947
- M. Mieno and T. Yoshida, Surf. Coat. Technol., 59 (1992) 87.
- (1992) Surf. Coat. Technol. , vol.59 , pp. 87
- Mieno, M.¹ Yoshida, T.²

5
- 2142739264
- V.Yu. Kulikovsky, L.R. Shaginyan, V.M. Vereschaka and N.G. Hatynenko, Diamond Relat. Mater., 4 (1995) 113.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 113
- Kulikovsky, V.Yu.¹ Shaginyan, L.R.² Vereschaka, V.M.³ Hatynenko, N.G.⁴

6
- 0026840014
- D.G. Rickerby, P.N. Gibson, W. Gisler and J. Haupt, Thin Solid Films, 209 (1992) 155.
- (1992) Thin Solid Films , vol.209 , pp. 155
- Rickerby, D.G.¹ Gibson, P.N.² Gisler, W.³ Haupt, J.⁴

7
- 0028419960
- S. Reinke, M. Kuhr and W. Kulish, Diamond Relat. Mater., 3 (1994) 341.
- (1994) Diamond Relat. Mater. , vol.3 , pp. 341
- Reinke, S.¹ Kuhr, M.² Kulish, W.³

8
- 0014756355
- J.S. Logan, IBM J. Res. Dev., 14 (1970) 172.
- (1970) IBM J. Res. Dev. , vol.14 , pp. 172
- Logan, J.S.¹

9
- 0018308598
- J.H. Keller and W.B. Pennebaker, IBM J. Res. Dev., 23 (1979) 3.
- (1979) IBM J. Res. Dev. , vol.23 , pp. 3
- Keller, J.H.¹ Pennebaker, W.B.²

10
- 0042437916
- P.K. Banerjee, B. Chatterjee, J.S. Kim, M. Platek, Y. Zhang and S. Mitra, Phys. Status Solidia, 140 (1993) 145.
- (1993) Phys. Status Solidia , vol.140 , pp. 145
- Banerjee, P.K.¹ Chatterjee, B.² Kim, J.S.³ Platek, M.⁴ Zhang, Y.⁵ Mitra, S.⁶

11
- 0023643216
- K.H. Seidel, K. Reichelt, W. Schaal and H. Dimigen, Thin Solid Films, 151 (1987) 243.
- (1987) Thin Solid Films , vol.151 , pp. 243
- Seidel, K.H.¹ Reichelt, K.² Schaal, W.³ Dimigen, H.⁴

12
- 0026141621
- W. Gissler, J. Haupt, A. Hoffmann, P.N. Gibson and D.G. Rickerby, Thin Solid Films, 199 (1991) 113.
- (1991) Thin Solid Films , vol.199 , pp. 113
- Gissler, W.¹ Haupt, J.² Hoffmann, A.³ Gibson, P.N.⁴ Rickerby, D.G.⁵

13
- 4544350416
- R. Geick, C.H. Perry and G. Rupprecht, Phys. Rev., 146 (1966) 543.
- (1966) Phys. Rev. , vol.146 , pp. 543
- Geick, R.¹ Perry, C.H.² Rupprecht, G.³

14
- 36049057047
- P.J. Gielisse, S.S. Mitra, J.N. Plends, R.D. Griffis, L.C. Mansu, R. Marshall and E.A. Pascoe, Phys. Rev., 155 (1967) 1039.
- (1967) Phys. Rev. , vol.155 , pp. 1039
- Gielisse, P.J.¹ Mitra, S.S.² Plends, J.N.³ Griffis, R.D.⁴ Mansu, L.C.⁵ Marshall, R.⁶ Pascoe, E.A.⁷

15
- 0028446211
- S. Jäger, K. Bewilogua and C.-P. Klages, Thin Solid Films, 245 (1994) 50.
- (1994) Thin Solid Films , vol.245 , pp. 50
- Jäger, S.¹ Bewilogua, K.² Klages, C.-P.³

16
- 0003438120
- Joint Committee on Powder Diffraction Standards, Swarthmore, PA
- Joint Committee on Powder Diffraction Standards, JCPDS Powder Diffraction File, Joint Committee on Powder Diffraction Standards, Swarthmore, PA.
- JCPDS Powder Diffraction File

17
- 0001553955
- M.D. Wiggins and C.R. Aita, J. Vac. Sci. Technol. A, 2 (2) (1984) 322.
- (1984) J. Vac. Sci. Technol. A , vol.2 , Issue.2 , pp. 322
- Wiggins, M.D.¹ Aita, C.R.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.