Suppression of suicide formation in Ta/Si system by ion-beam-assisted deposition

Applied Physics Letters

Volumn 71, Issue 17, 1997, Pages 2451-2453

  Kwak, Joon Seop ^a   Baik, Hong Koo ^a   Kim, Jong Hoon ^b   Lee, Sung Man ^b  

^a Yonsei University   (South Korea)

^b Kangwon National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000019733     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120086     Document Type: Article

References (14)

1. P. L. Pai and C. H. Ting, IEEE Electron Device Lett. 10, 423 (1989).
2. M. B. Small and D. J. Pearson, IBM J. Res. Dev. 34, 858 (1990).
3. J. D. Mcbrayer, R. M. Swanson, and T. W. Sigmon, J. Electrochem. Soc. 123, 1242 (1986).
4. A. Broniatowski, Phys. Rev. Lett. 62, 3074 (1989).
5. K. Holloway, P. M. Fryer, C. Cabrai, Jr., J. M. E. Harper, P. J, Bailey, and K. H. Kelleher, J. Appl. Phys. 71, 5433 (1992).
6. S.-Y. Jang, S.-M. Lee, and H. K. Baik, J. Mater. Sci. 7, 271 (1996).
7. E. Kolawa, J. S. Chen, J. S. Reid, P. J. Pokela, and M. A. Nicolet, J. Appl. Phys. 70, 1369 (1991).
8. D.-S. Yoon, H. K. Baik, B.-S. Rang, and S.-M. Lee, J. Appl. Phys. 80, 6550 (1996).
9. J. Y. Cheng and L. J. Chen. J. Appl. Phys. 69, 2161 (1991).
10. C. L. Au, W. A. Anderson, D. A. Schmitz, J. C. Flassayer, and F. M. Collins, J. Mater. Res. 5, 1224 (1990).
11. R. M. Tromp, G. W. Rubloff, and E. J. van Loenen, J. Vac. Sci. Technol. A 4, 865 (1986).
12. D. Wolf and S. Yip. Materials Interfaces (Chapman & Hall, London, 1992), Chap. 20.
13. W. J. Meng, C. W. Nieh, and W. L. Johnson, Appl. Phys. Lett. 51, 1693 (1987).
14. B.-S. Kang, S.-M. Lee, J. S. Kwak, D.-S. Yoon, and H. K. Baik, J. Electrochem. Soc. 144, 1807 (1997).