Synthesis and stabilization of stibine for low-temperature chemical vapor deposition of carbon-free antimony films

Chemistry of Materials

Volumn 11, Issue 3, 1999, Pages 547-551

  Todd, Michael A ^a   Bandari, Gautam ^a   Baum, Thomas H ^a  

^a Advanced Technology Materials Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000014359     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm980121m     Document Type: Article

References (19)

1. Lin, C. H.; Murry, S. J.; Zhang , D.; Chang, P. C.; Zhou, Y.; Pei, S. S.; Malin, J. I.; Felix, C. L.; Meyer, J. R.; Hoffman, C. A.; Pinto, J. F. J. Cryst. Growth 1997, 175, 955.
2. Stauf, G. T.; Gaskill, D. K.; Bottka, N.; Gedridge, Jr., R. W. Appl. Phys. Lett. 1991, 58 (12), 1311.
3. Gaskill, D. K.; Stauf, G. T.; Bottka, N. Appl. Phys. Lett. 1991, 58 (17), 1905.
4. Lin, C. H.; Yang, R. Q.; Zhang, D.; Murry, S. J.; Pei, S. S.; Allerma, A. A.; Kurtz, S. R. Electron Lett. 1997, 33, 598.
5. Kim, J. D.; Wu, D.; Wojkowski, J.; Piotrowski, J.; Xu, J.; Razeghi, M. Appl. Phys. Lett. 1996, 68, 99.
6. Bocchi, C.; Bosacchi, A.; Franchi, S.; Gennari, S.; Magnanini, R.; Drigo, A. V. Appl. Phys. Lett. 1997, 71 (11), 1549.
7. Lee, J. J.; Kim, J. D.; Razeghi, M. Appl. Phys. Lett. 1997, 70(24), 3266.
8. Yang, J.; Heremans, J.; Partin, D. L.; Thrush, C. M.; Naik, R. J. Appl. Phys. 1998, 83 (4), 2041.
9. Stauf, G. T.; Gaskill, D. K.; Bottka, N.; Gedridge, C. W., Jr. Mater. Res. Soc. Symp. Proc. Vol. 1991, 216, 239.
10. Lane, B.; Wu, D.; Rybaltowski, A.; Yi, H.; Diaz, J.; Razeghi, M. Appl. Phys. Lett. 1997, 70, 443.
11. Boggess, T. F.; McCahon, S. W.; Anson, S. T.; Olesberg, J. T.; Flatte, M. E.; Chow, D. H.; Hasenberg, T. C.; Grein, C. H. Electronic Materials Conference, Santa Barbara, CA, 1996.
12. Kurtz, S. R.; Biefeld, R. M.; Allerman, A. A.; Hjalmarson, H. J. Electronic Materials Conference, Santa Barbara, CA, 1996.
13. Sigiura, O.; Kameda, H.; Shina, K.; Matsumara, M. J. Electron. Mater. 1988, 17 (1), 11.
14. Olschewski, K. Berichte Deutschen Chemischen Gesellshaft 1901, 34, 3592.
15. Halonen, H.; Halonen, L.; Burger, H.; Moritz, P. J. Chem. Phys. 1991, 95(10), 7099.
16. Lowry, T. H.; Richardson, K. S. Mechanism and Theory in Organic Chemistry, 3rd ed.; Harper and Row Publishers: New York, 1987; pp 232-238.
17. Bigeleisen, J.; Goeppert Mayer, M. J. Chem. Phys. 1947, 15 (5), 261.
18. McManus, J. V.; Edwards, D.; Olander, W. K.; Kirk, R.; Romig, T.; Shi, J. 1996 11th International Conference on Ion Implantation Technology Proceedings, 1997, p 804.
19. Jolly, W. E.; Drake, J. E. Inorg. Synth.1958, 7, 34.