New developments in SDS gas source technology for ion implantation

Proceedings of the International Conference on Ion Implantation Technology

Volumn , Issue , 1996, Pages 804-807

  McManus, James V ^a   Edwards, Doug ^a   Olander, W Karl ^a   Kirk, Ralph ^a   Romig, Terry ^a   Shi, JingHong ^a  

^a Advanced Technology Materials Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCIDENT PREVENTION; ARSENIC COMPOUNDS; GAS CYLINDERS; ION SOURCES; PHOSPHORUS COMPOUNDS; SAFE HANDLING; SERVICE LIFE;

ARSINE; LOW PRESSURE STORAGE; PHOSPHINE; SAFE DELIVERY SOURCE (SDS);

ION IMPLANTATION;

EID: 0030368336     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)