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Journal of Crystal Growth

Volumn 272, Issue 1-4 SPEC. ISS., 2004, Pages 125-130

In-situ etching of InP and InGaAlAs materials by using HCl gas in metalorganic vapor-phase epitaxy

(5) Tsuchiya, T a Kitatani, T a Ouchi, K a Sato, H a Aoki, M a

a HITACHI LTD (Japan)

Author keywords

A1. Etching; A3. Metalorganic vapor phase epitaxy; B1. InGaAlAs; B2. Semiconducting indium phosphide; B3. Laser diode

Indexed keywords

ALUMINUM; CRYSTAL STRUCTURE; ETCHING; HYDROCHLORIC ACID; INTERFACES (MATERIALS); METALLORGANIC VAPOR PHASE EPITAXY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTOR LASERS;

CRYSTALLINE QUALITY; ETCHING RATE; INGAALAS; REGROWTH PATTERNS;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 9944237735 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2004.09.018 Document Type: Conference Paper

Times cited : (5)

References (11)

1
- 0028762071
- R. Bhat, C.E. Zah, M.A. Koza, B. Pathak, F. Favire, W. Lin, M.C. Wang, N.C. Andreadakis, D.M. Hwamg, T.P. Lee, Z. Wang, D. Darby, D. Flanders, J.J. Hsieh, J. Crystal Growth 145 (1994) 858.
- (1994) J. Crystal Growth , vol.145 , pp. 858
- Bhat, R.¹ Zah, C.E.² Koza, M.A.³ Pathak, B.⁴ Favire, F.⁵ Lin, W.⁶ Wang, M.C.⁷ Andreadakis, N.C.⁸ Hwamg, D.M.⁹ Lee, T.P.¹⁰ Wang, Z.¹¹ Darby, D.¹² Flanders, D.¹³ Hsieh, J.J.¹⁴

2
- 0028379805
- C.E. Zah, R. Bhat, B.N. Pathak, F. Favire, D.M. Hwang, M.A. Koza, T.P. Lee, Z. Wang, D. Darby, D. Flanders, J.J. Hsieh, IEEE J. Quantum Electron. 30 (1994) 511.
- (1994) IEEE J. Quantum Electron. , vol.30 , pp. 511
- Zah, C.E.¹ Bhat, R.² Pathak, B.N.³ Favire, F.⁴ Hwang, D.M.⁵ Koza, M.A.⁶ Lee, T.P.⁷ Wang, Z.⁸ Darby, D.⁹ Flanders, D.¹⁰ Hsieh, J.J.¹¹

3
- 0028761877
- Y. Inoue, K. Shimoyama, K. Fujii, N. Hosoi, H. Gotoh, J. Crystal Growth 145 (1994) 881.
- (1994) J. Crystal Growth , vol.145 , pp. 881
- Inoue, Y.¹ Shimoyama, K.² Fujii, K.³ Hosoi, N.⁴ Gotoh, H.⁵

4
- 9944227367
- K. Hinzer, G. Knight, D. Goodchild, T. Grevatt, G. Letal, R. Finlay, J. White, Technical Digest of Optical Fiber Commun. 2003, Vol. FG7, 2003, p. 684.
- (2003) Technical Digest of Optical Fiber Commun. 2003 , vol.FG7 , pp. 684
- Hinzer, K.¹ Knight, G.² Goodchild, D.³ Grevatt, T.⁴ Letal, G.⁵ Finlay, R.⁶ White, J.⁷

5
- 0037291751
- R. Gessner, A. Dobbinson, A. Miler, J. Rieger, E. Veuhoff, J. Crystal Growth 248 (2003) 426.
- (2003) J. Crystal Growth , vol.248 , pp. 426
- Gessner, R.¹ Dobbinson, A.² Miler, A.³ Rieger, J.⁴ Veuhoff, E.⁵

6
- 0036045748
- A. Ougazzaden, L. Peticolas, M. Rader, S.N.G. Chu, Proceedings of the Indium Phosphide and Related Materials 2002, Vol. B3-5, 2002, p. 327.
- (2002) Proceedings of the Indium Phosphide and Related Materials 2002 , vol.B3-5 , pp. 327
- Ougazzaden, A.¹ Peticolas, L.² Rader, M.³ Chu, S.N.G.⁴

7
- 0034857647
- S. Arakawa, M. Itoh, A. Kasukawa, Proceedings of the Indium Phosphide and Related Materials 2001, Vol. TuB2-3, 2001, p. 71.
- (2001) Proceedings of the Indium Phosphide and Related Materials 2001 , vol.TUB2-3 , pp. 71
- Arakawa, S.¹ Itoh, M.² Kasukawa, A.³

8
- 0036049824
- P. Wolfram, D. Franke, W. Ebert, N. Grote, Proceedings of the Indium Phosphide and Related Materials 2002, Vol. B3-6, 2002, p. 331.
- (2002) Proceedings of the Indium Phosphide and Related Materials 2002 , vol.B3-6 , pp. 331
- Wolfram, P.¹ Franke, D.² Ebert, W.³ Grote, N.⁴

9
- 0025839436
- C. Caneau, R. Bhat, M. Koza, J.R. Hayes, R. Esagui, J. Crystal Growth 107 (1991) 203.
- (1991) J. Crystal Growth , vol.107 , pp. 203
- Caneau, C.¹ Bhat, R.² Koza, M.³ Hayes, J.R.⁴ Esagui, R.⁵

10
- 0028761982
- K. Fujii, K. Shimoyama, H. Miyata, Y. Inoue, N. Hosoi, J.Crystal Growth 145 (1994) 277.
- (1994) J.Crystal Growth , vol.145 , pp. 277
- Fujii, K.¹ Shimoyama, K.² Miyata, H.³ Inoue, Y.⁴ Hosoi, N.⁵

11
- 0032477182
- D. Bertone, R. Campi, G. Morello, J. Crystal Growth 195 (1998) 624.
- (1998) J. Crystal Growth , vol.195 , pp. 624
- Bertone, D.¹ Campi, R.² Morello, G.³

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