In-situ etching of inp and related materials in MOVPE chamber using PCI3

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 2002, Pages 327-330

  Ougazzaden, A ^a   Peticolas, L ^a   Rader, Mike ^a   Chu, S N G ^a  

^a AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; METALLORGANIC VAPOR PHASE EPITAXY; MORPHOLOGY; PRESSURE EFFECTS; SILICA; SURFACES;

METALLORGANIC VAPOR PHASE EPITAXY (MOVPE) CHAMBERS;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0036045748     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)