Improvement of the linearity of a capacitive pressure sensor using an interdigitated electrode structure

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 586-590

  Kim, Hyeoncheol ^a   Jeong, Yong Gwon ^a   Chun, Kukjin ^a  

^a Seoul National University   (South Korea)

Author keywords

Capacitive sensors; Interdigitated electrodes; Pressure sensors; Simulations

Indexed keywords

CAPACITANCE MEASUREMENT; CAPACITORS; COMPUTER SIMULATION; DIAPHRAGMS; ELECTRODES; MICROMACHINING; OPTIMIZATION;

CAPACITIVE PRESSURE SENSORS; INTERDIGITATED ELECTRODES; SOFTWARE PACKAGE CAPS;

PRESSURE TRANSDUCERS;

EID: 0031175603     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01591-4     Document Type: Article

References (10)

1. S.K. Clark and K.D. Wise, Pressure sensitivity in anisotropically etched thin diaphragm pressure sensors, IEEE Trans. Electron Devices, ED-26 (1979) 1887-1896.
2. W.H. Ko and Min-Hang Bae, A high-sensitivity integrated-circuit capacitive pressure transducer, IEEE Trans. Electron Devices, ED-29 (1982) 48-56.
3. B. Puers, E. Peeters, A. Van Den Bossche and W. Sansen, A capacitive pressure sensor with low impedance output and active suppression of parasitic effects. Sensors and Actuators, A21-A23 (1990) 108-114.
4. U. Schoneberg, F.V. Schnatz, W. Brockherde, P. Kopystynski, T. Mehlhorn, E. Obermeier and H. Benzel, CMOS integrated capacitive pressure transducer with on-chip electronics and digital calibration capability, IEEE Proc., 1991, pp. 304-307.
5. P. Hille, R. Hohler and H. Strack, A linearisation and compensation method for integrated sensors, Sensors and Actuators A, 44 (1994) 95-102.
6. S.B. Crary, W.G. Baer, J.C. Cowles and K.D. Wise, Digital compensation of high-performance silicon pressure transducers, Sensors and Actuators, A21-A23 (1990) 70-72.
7. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells, McGraw-Hill, New York, 1959, p. 421.
8. B. Puers, E. Peeters, A.V.D. Bossche and W. Sansen, A capacitive pressure sensor with low impedance output and active suppression of parasitic effects, Sensors and Actuators, A21-A23 (1990) 108-114.
9. K.W. Lee and K.D. Wise, SENSIM: a simulation program for solid-state pressure sensors, IEEE Trans. Electron Devices, ED-29 (1982) 34-41.
10. J.T. Kung, H.S. Lee and R.T. Howe, A digital readout technique for capacitive sensor applications, IEEE J. Solid-State Circuits, SC-23 (1988) 972-977.