An ontology for production control of semiconductor manufacturing processes

Lecture Notes in Artificial Intelligence (Subseries of Lecture Notes in Computer Science)

Volumn 2831, Issue , 2003, Pages 156-167

  Mönch, Lars ^a   Stehli, Marcel ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER ARCHITECTURE; CONTROL SYSTEMS; DATABASE SYSTEMS; DECISION MAKING; EXPERT SYSTEMS; PREVENTIVE MAINTENANCE; PRODUCTION CONTROL; RESOURCE ALLOCATION; SOFTWARE AGENTS; STRATEGIC PLANNING; BATCH DATA PROCESSING; MANUFACTURE; MULTI AGENT SYSTEMS; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE;

ONTOLOGY; PROCESS FLOW; PRODUCT MIX; AGENT BASED ARCHITECTURES; AUTONOMOUS ENTITIES; HIERARCHICAL CONTROL; HIERARCHICAL DECOMPOSITIONS; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR MANUFACTURING PROCESS; SEQUENCE-DEPENDENT SETUP TIME; TECHNOLOGICAL PROCESS;

SEMICONDUCTOR DEVICE MANUFACTURE; PROCESS CONTROL;

EID: 9444239837     PISSN: 03029743     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-540-39869-1_14     Document Type: Conference Paper

References (17)

1. Caire, G.: Jade Tutorial: Application-defined Content Languages and Ontologies. TILab S.p.A. (2002)
2. FABMAS Project Web Site: http://www.tu-ilmenau.de/fabmas (2003)
3. FIPA Ontology Specification: http://www.fipa.org/specs/fipa00006/ (1998)
4. Gruber, T. R.: Towards Principles for the Design of Ontologies Used for Knowledge Sharing. Int. J. Hum. Comp. Studies 43 (5/6) (1995) 907-928
5. Habenicht, L, Mönch, L.: A Finite Capacity Beam-Search Algorithm for Production Scheduling of Semiconductor Wafer Fabrication Facilities. In: Yücesan, E., Chen, C.-H., Snowdown, J. L., Charnes, J. M. (eds.): Proceedings of the 2002 Winter Simulation Conference, San Diego, USA (2002) 1406-1413
6. Heikkilä, T., Kollingbaum, M., Valckenaers, P., Bluemink, G.-J.: An Agent Architecture for Manufacturing Control: ManAge, Computers in Industry 46 (2001) 315-331
7. Mesarovic, M. D., Y. Takahara: Abstract System Theory, Lecture Notes in Control and Information Sciences, Springer-Verlag, Berlin, Heidelberg, New York, London, Paris, Tokyo (1989)
8. Mönch, L.: Analyse und Design für ein agentenbasiertes System zur Steuerung von Produktionsprozessen in der Halbleiterindustrie. In: Proceedings Verbundtagung Verteilte Informationssysteme auf der Grundlage von Objekten, Komponenten und Agenten (vertIS 2001) 99-112
9. th European Simulation Symposium. Simulation in Industry, Dresden (2002) 331-337
10. Mönch, L., Stehli, M., Zimmermann, J.: FABMAS - an Agent-Based System for Production Control of Semiconductor Manufacturing Processes. To Appear in Proceedings of the First International Conference on Industrial Application of Holonic and Multi-Agent-Systems (HoloMAS 2003). Prague, Czech Republic (2003)
11. th International Workshop on Database and Expert Systems Applications (2002)
12. Schneeweiß, C.: Hierarchies in Distributed Decision-Making. Springer-Verlag (1999)
13. Smith, S., Becker, M.: An Ontology for Constructing Scheduling Systems. In: Working Notes of the 1997 Symposium on Ontological Engineering, AAAI Press (1997)
14. Srivatsan, N., Bai, S. X., Gershwin, S. B.: Hierarchical Real-Time Integrated Scheduling of a Semiconductor Fabrication Facility. Control and Dynamic Systems (61) (1994) 197-241
15. Wouters, C., Dillon, T., Rahayu, W., Chang, E.: A Practical Walkthrough of the Ontology Derivation Rules. In: R. Cichetti et al. (Eds.): DEXA 2002, LNCS 2453, 259-268, Springer-Verlag, Berlin Heidelberg (2002)
16. Uschold, M., King, M., Moralee, S., Zorgios, Y.: The Enterprise Ontology, http://www.aiai.ed.ac.uk/-enterprise/enterprise/ontology.html#papers, (1997)
17. Van Brussel, H., Wyns, J., Valckenaers, P., Bongaerts, L., Peeters, P.: Reference Architecture for Holonic Manufacturing Systems: PROSA. Computers in Industry, Special Issue on Intelligent Manufacturing Systems 37(3) (1998) 225-276