FABMAS: An agent-based system for production control of semiconductor manufacturing processes

Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)

Volumn 3131, Issue , 2003, Pages 258-267

  Mönch, Lars ^a   Stehli, Marcel ^a   Zimmermann, Jens ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

C++ (PROGRAMMING LANGUAGE); CONTROL SYSTEMS; MANUFACTURE; MIDDLEWARE; PREVENTIVE MAINTENANCE; PROCESS CONTROL; PRODUCTION CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; C (PROGRAMMING LANGUAGE); COMPUTER ARCHITECTURE; DATA REDUCTION; HIERARCHICAL SYSTEMS; PARALLEL PROCESSING SYSTEMS;

AGENT-BASED SYSTEMS; DISCRETE-EVENT SIMULATORS; HIERARCHICAL PRODUCTION CONTROL; MANUFACTURING PROCESS; REFERENCE ARCHITECTURE; SEMICONDUCTOR MANUFACTURING PROCESS; SEMICONDUCTOR WAFER FABRICATION; TECHNOLOGICAL PROCESS;

MULTI AGENT SYSTEMS;

MANUFACTURING PROCESSES; PARALLEL MACHINES; PRODUCT FLOWS; TECHNOLOGICAL PROCESSES;

EID: 84948978492     PISSN: 03029743     EISSN: 16113349     Source Type: Book Series    
DOI: 10.1007/978-3-540-45185-3_24     Document Type: Conference Paper

References (10)

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