Acoustically actuated flextensional SixNy and single-crystal silicon 2-D micromachined ejector arrays

IEEE Transactions on Semiconductor Manufacturing

Volumn 17, Issue 4, 2004, Pages 517-524

  Demirci, Utkan ^a,b   Yaralioglu, Goksen G ^b   Hæggström, Edward ^b,c   Perçin, Gökhan ^b   Ergun, Sanli ^b   Khuri Yakub, B T ^a,b  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

^c UNIVERSITY OF HELSINKI   (Finland)

Author keywords

Deposition; Droplet ejection; Inkjet; Microelectromechanical systems (mems); Transducer; Ultrasound; Wafer coating

Indexed keywords

DEPOSITION; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PHOTORESISTS; PIEZOELECTRIC TRANSDUCERS; SINGLE CRYSTALS; ULTRASONICS;

DROPLET EJECTION; EJECTOR ARRAYS; MICROELECTROMECHANICAL SYSTEMS (MEMS); WAFER COATING;

SILICON NITRIDE;

EID: 9144245017     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2004.835714     Document Type: Article

References (22)

1. B. Bednar, J. Kralicek, and J. Zachoval, Resists in Microlithography and Printing. Amsterdam, The Netherlands: Elsevier, 1993, pp. 77-82.
2. J. Derksen, S. Han, and J.-H. Chun, "Extrusion spin coating: An efficient photoresist coating process for wafers," in Proc. Semiconductor Manufacturing Conf., IEEE Int. Symp., Oct., 11-13 1999, pp. 245-248.
3. G. Perçin, T. Lundgren, and B. T. Khuri-Yakub, "Photoresist deposition without spinning," IEEE Trans. Semiconduct. Manufact., vol. 16, pp. 452-459, Aug. 2003.
4. L. M. Peurrung and D. B. Graves, "Spin coating over topography," IEEE Trans. Semiconduct. Manufact., vol. 6, pp. 72-76, Feb. 1993.
5. T. R. Hebner, C. C. Wu, D. Marcy, M. H. Lu, and J. C. Strum, "Ink-jet printing of doped polymers for organic light emitting devices," Appl. Phys. Lett., vol. 72, no. 5, pp. 519-521, 1998.
6. C. M. Roth and M. L. Yarmush, "Nucleic acid biotechnology," Ann. Rev. Biomed. Eng., vol. 1, pp. 265-297, 1999.
7. J. M. Jaklevic, H. R. Gamer, and G. A. Miller, "Instrumentation for the genome project," Ann. Rev. Biomed. Eng., vol. 1, pp. 265-297, 1999.
8. P. Luginbuhl, P. F. Indermuhle, M. A. Gretillat, F. Willemin, N. F. de Rooij, D. Gerber, G. Gervasio, J. L. Vuilleumier, D. Twerenbold, M. Duggelin, and R. Guggenheim, "Micromachined injector for DNA mass spectrometry," in Proc. Transducers'99, pp. 1130-1133.
9. H. P. Le, "Progress and trends in inkjet printing technology," J. Imaging Sci. Technol., vol. 42, no. 1, pp. 49-62, 1998.
10. N. Maehara and S. Ueha, "Influence of the vibrating system of a multipinhole-plate ultrasonic nebulizer on its performance," Mori, Rev. Sci. Instrum., vol. 57, no. 11, pp. 2870-2876, 1986.
11. G. Perçin, "Micromachined piezoelectrically actuated flextensional transducers for high resolution printing and imaging," Ph.D. dissertation, Stanford University, Stanford, CA, 2002.
12. G. Perçin, L. Levin, and B. T. Khuri-Yakub, "Piezoelectrically actuated droplet ejector," Rev. Sci. Instrum., vol. 68, pp. 4561-4563, 1997.
13. G. Perçin, T. Lundgren, and B. T. Khuri-Yakub, "Controlled ink-jet printing and deposition of organic polymers and solid particles," Appl. Phys. Lett., vol. 73, no. 16, pp. 2375-2377, 1998.
14. G. Perçin and B. T. Khuri-Yakub, Rev. Sci. Instrum., vol. 74, no. 2, pp. 1120-1127, 2003.
15. G. Perçin, A. Atalar, F. L. Degertekin, and B. T. Khuri-Yakub, "Micromachined two-dimensional array piezoelectrically actuated transducers," Appl. Phys. Lett., vol. 72, no. 11, pp. 1397-1399, 1998.
16. CRC Materials Science and Engineering.
17. A. W. Leissa, Vibration of Plates: Scientific Technical Information Div., Office of Technology Utilization, NASA, 1969, pp. 1G-10G.
18. U. Gosele, M. Alexe, P. Kopperschmidt, and Q.-Y. Tong, "Semiconductor wafer bonding: A flexible approach to materials combinations in microelectronics, micromehanics and optoelectronics," in Proc. Semiconductor Conf. CAS, 1997, pp. 23-32.
19. Datasheet for SOI Wafers, Aug. 2003.
20. E. R. Lee, Microdrop Generation. Boca Raton, FL: CRC, 2003.
21. S. A. Elrod, B. Hadimlioglu, B. T. Khuri-Yakub, E. G. Rawson, E. Richley, C. F. Quate, N. N. Mansour, and T. S. Lundgren, "Nozzleless droplet formation with focused acoustic beams," J. Appl. Phys., vol. 65, pp. 3441-3447, 1989.
22. F. R. S. Rayleigh, "On the stability of Jets," in Proc. London Math. Soc., vol. 10, 1878, pp. 4-13.