Modeling and initial growth mode of ultrathin film on the basis of electrical conductivity of substrate

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 9 A, 2004, Pages 6452-6456

  Song, Seok Kyun ^a   Koh, Seok Keun ^b   Lee, Deuk Yeon ^c   Song, Kie Moon ^c   Baik, Hong Koo ^c  

^a UION Corporation   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

^c Yonsei University   (South Korea)

Author keywords

6 different growth modes; Electrical conductance; In situ electrical conductivity; Initial growth

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRON DIFFRACTION; FILM GROWTH; FLUORESCENCE; MATHEMATICAL MODELS; NUCLEATION;

BULK CONDUCTIVITY; INITIAL GROWTH; X-RAY FLUORESCENCE SPECTROSCOPY;

ULTRATHIN FILMS;

EID: 9144238403     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.6452     Document Type: Article

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