Initial Growth Characteristics of Gold Thin Films by a Nozzle Beam and Ion-Assisted Deposition

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 43, Issue 1 A/B, 2004, Pages

  Song, Seok Kyun ^a   Koh, Seok Keun ^b   Lee, Deuk Yeon ^c   Baik, Hong Koo ^c  

^a UION Corporation   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

^c Yonsei University   (South Korea)

Author keywords

Au films; In situ measurement; Nozzle beam; Onset thickness

Indexed keywords

AGGLOMERATION; CURRENT DENSITY; DEPOSITION; ELECTRIC CONDUCTANCE; FILM GROWTH; FUNCTIONS; GOLD; NOZZLES;

AU FILMS; IN SITU MEASUREMENTS; NOZZLE BEAMS; ONSET THICKNESS;

THIN FILMS;

EID: 1842659034     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.L15     Document Type: Article

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