FEM calculations on laser bending of silicon with a moving laser source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5455, Issue , 2004, Pages 407-414

  Loschner U ^a   Exner, H ^a  

^a Hochschule Mittweida   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (FORMING); COMPUTATIONAL COMPLEXITY; DATA ACQUISITION; FINITE ELEMENT METHOD; LASERS; MICROSTRUCTURE; RADIATION;

ENERGY INPUT; LASER SOURCE; LASER SYSTEMS; MICROSYSTEMS;

SILICON;

EID: 8844281985     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.544814     Document Type: Conference Paper

References (7)

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2. H. Exner, U. Löschner; Contactless laser bending of silicon microstructures, Smart Sensors, Actuators, and MEMS, Maspalomas, Gran Canaria, Spain, 19.-21.5. 2003, proceedings of SPIE, Volume 5116, S. 383-392.
3. F. Vollertsen; Laserstrahlumformung, lasergestützte Formgebung: Verfahren, Mechanismen, Modellierung; Bamberg: Meisenbach 1996
4. J. Frühauf, E. Gärtner, E. Jänsch; Silicon as a plastic material; Journal of Micromechanics and Microengineering 9, (1999), p.305-312
5. Ch. Dietz; Praxisorientierte Prozeßentwicklung zum Laserstrahlbiegen von Feinblechen; Berichte aus der Produktionstechnik, RWTH Aachen, Band 98,20 (1998), p.1-173
6. P.J. Cheng, S.C. Lin; An analytical model for the temperature field in the laser forming of sheet metal; Journal of Materials Processing Technology 101: (1-3), (2000), p.260-267
7. J. Frühauf, E. Gärtner, E. Jänsch; New aspects of the plastic deformation of silicon - prerequisites for the reshaping of silicon microelements; Applied Physics A 68, (1999), p.673-679