Model development and control design for high speed atomic force microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5383, Issue , 2004, Pages 457-468

  Hatch, Andrew G ^a   Smith, Ralph C ^a   De, Tathagata ^b  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b Iowa State University   (United States)

Author keywords

Atomic force microscope (AFM); General densities; Hysteresis; Robust control design

Indexed keywords

GENERAL DENSITIES; NANOELECTROMECHANICAL (NEMS); NUCLEAR MAGNETIC RESONANCE MICROSCOPE (NMRM); ULTRA-HIGH RESOLUTION;

ATOMIC FORCE MICROSCOPY; FEEDBACK; HYSTERESIS; NANOTECHNOLOGY; NUCLEAR MAGNETIC RESONANCE; QUALITY CONTROL; ROBUSTNESS (CONTROL SYSTEMS);

CONTROL THEORY;

EID: 8844281625     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.539921     Document Type: Conference Paper

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