Effect of nitrogen feedgas addition on the mechanical properties of nano-structured carbon coatings

ASTM Special Technical Publication

Volumn , Issue 1413, 2001, Pages 127-138

  Catledge, S A ^a   Vohra, Y K ^a  

^a UNIVERSITY OF ALABAMA AT BIRMINGHAM   (United States)

Author keywords

Chemical vapor deposition; Diamond; Hardness; Nano indentation; Nano structured carbon; Nitrogen; Titanium

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; COATINGS; DIAMONDS; NANOSTRUCTURED MATERIALS; NITROGEN;

FILM STRUCTURE; HIGH PHASE PURITY; NANO-INDENTATION; NANO-STRUCTURED CARBON;

CARBON;

EID: 8844248646     PISSN: 00660558     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1520/stp10986s     Document Type: Conference Paper

References (11)

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