Microscale laser shock peening of thin films, Part 1: Experiment, modeling and simulation

Journal of Manufacturing Science and Engineering

Volumn 126, Issue 1, 2004, Pages 10-17

  Zhang, Wenwu ^a,c   Yao, Y Lawrence ^a   Noyan, I C ^b  

^a Columbia University ^*  (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c GE GLOBAL RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRACK PROPAGATION; CRYSTAL LATTICES; CRYSTAL STRUCTURE; FAILURE ANALYSIS; LASERS; MICROSTRUCTURE; PERFORMANCE; PRESSURE; RESIDUAL STRESSES; SILICON; STRESS CONCENTRATION;

LASER SHOCK PEENING (LSP); SHOCK PRESSURE; SHOCK WAVE PROPAGATION; SPATIAL RESOLUTIONS;

THIN FILMS;

EID: 8744294742     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1645878     Document Type: Article

References (28)

1. Miller, S. L., Rodgers, M. S., LaVigine, G., Sniegowski, J. J., Clews, P., Tanner, D. M., and Peterson, K. A., 1998, "Failure Modes in Surface Micro-machined Micro-Electro-Mechanical Actuators," IEEE 98CH36173, 36th Annual International Reliability Physics Symposium, pp. 17-25.
2. Tanner, D. M., Walraven, J. A., Helgesen, K. S., Irwin, L. W., Gregory, D. L., Stake, J. R., and Smith, N. F., 2000, "MEMS Reliability in a Vibration Environment," IEEE 00CH37059, 38th Annual International Reliability Physics Symposium, pp. 139-145.
3. Chang, C., and Chang. P., 2000, "Innovative Micromachined Microwave Switch with Very Low Insertion Loss," Sens. Actuators A, 79(1), Jan., pp. 71-75.
4. Tanner, D. M., Miller, W. M., Peterson, K. A., Dugger, M. T., Eaton, W. P., Irwin, L. W., Senft, D. C., Smith, N. F., Tangyunyong, P., and Miller, S. L., 1999. "Frequency Dependence of the Lifetime of a Surface Micromachined Microengine Driving a Load," Microelectron. Reliab., 39(3), pp. 401-414.
5. Walraven, J. A., Mani, S. S., Fleming, J. G., Headley, T. J., Kotula, P. G., Pimentel, A. A., Rye, M. J., Tanner, D. M., and Smith, N. F., 2000, "Failure Analysis of Tungsten Coated Polysilicon Micromachined Microengines," MEMS Reliability for Critical Applications, Proceedings of SPIE, Vol. 4180, pp. 49-57.
6. Petersen, Kurt E., 1982, "Silicon as a Mechanical Material," Proc. IEEE, 70(5), pp. 420-457.
7. Johansen, L. S., Ginnerup, M., Ravnkilde, J. T., Tang, P. T., and Löchel, B., 2000. "Electroforming of 3D Microstructures on Highly Structured Surfaces," Sens. Actuators A, 83(1-3), pp. 156-160.
8. Hart, T., and Watson, A., 2000, "Electroforming," Metal Finishing, 98(1), pp. 388-399.
9. Wei, Z.-J. et al., 2000, "Study of Wetters in Nickel Electroforming of 3D Microstructures," Mater. Chem. Phys., 63, pp. 235-239.
10. Zhang, W., and Yao, Y. L., 2000, "Improvement of Laser Induced Residual Stress Distributions via Shock Waves," Proc. ICALEO'00, Laser Materials Processing, Vol. 89, pp. E183-192.
11. Zhang, W., and Yao, Y. L., 2000b, "Micro Scale Laser Shock Processing of Metallic Components," ASME J. Manuf. Sci. Eng., 124(2), May, pp. 369-378.
12. Noyan, I. C., Jordan-Sweet, J. L., Liniger, E. G., and Kaldor, S. K., 1998, "Characterization of Substrate/Thin-film Interfaces with X-ray Microdiffraction," Appl. Phys. Lett., 72(25), pp. 3338-3340.
13. Suresh, S., and Giannakopoulos, A. E., 1998, "A New Method for Estimating Residual Stresses by Instrumented Sharp Indentation," Acta Mater., 46, pp. 5755-5767.
14. Fox, J. A., 1974, "Effect of Water and Paint Coatings on Laser-irradiated Targets," Appl. Phys. Lett., 24(10), pp. 461-464.
15. Segmüller, A., Angilelo, J., and La Placa, S. J., 1980, "Automatic X-ray Diffraction Measurement of the Lattice Curvature of Substrate Wafers for the Determination of Linear Strain Patterns," J. Appl. Phys., 51(12), pp. 6224-6230.
16. Stoney, G. G., 1909, "Metallic Films Deposited by Electrolysis," Proc. Royal Soc., 82(535), pp. 172-175.
17. Clauer, A. H., and Holbrook, J. H., 1981, "Effects of Laser Induced Shock Waves on Metals," Shock Waves and High Strain Phenomena in Metals-Concepts and Applications, New York, Plenum, pp. 675-702.
18. Fabbro, R., Fournier, J., Ballard, P., Devaux, D., and Virmont, J., 1990, "Physical Study of Laser-produced Plasma in Confined Geometry," J. Appl. Phys., 68(2), pp. 775-784.
19. Zhang, W., and Yao, Y. L., 2001, "Modeling and Simulation Improvement in Laser Shock Processing," Proc. ICALEO'2001, Section A.
20. Root, R. G., 1989, "Modeling of Post-breakdown Phenomena," Laser Induced Plasmas and Application, New York, Marcel Dekker, Inc., pp. 95-99.
21. Pirri, A. N., 1978, "Plasma Energy Transfer to Metal Surfaces Irradiated by Pulsed Lasers," AIAA J., 16(12), pp. 1296-1304.
22. Vogel, A., Nahen, K., Theisen, D., and Noack, J., 1996, "Plasma Formation in Water by Picosecond and Nanosecond Nd:YAG Laser Pulses," IEEE J. Sel. Top. Quantum Electron., 2(4), pp. 847-871.
23. Assay, James R., and Shahipoor, M., 1992, High-Pressure Shock Compression of Solids, New York, Springer-Verlag, pp. 78-82.
24. Meyer, L. W., 1992, "Constitutive Equations at High Strain Rates," Shock Wave and High-Strain-Rate Phenomena in Metals, New York, Marcel Dekker, Inc., pp. 49-68.
25. Teixeira, V., 2001, "Mechanical Integrity in PVD Coatings due to the Presence of Residual Stresses," Thin Solid Films, 392, pp. 276-281.
26. Sridhar, N., Srolovitz, D. J., and Suo, Z., 2001, "Kinetics of Buckling of a Compressed Film on a Viscous Substrate," Appl. Phys. Lett., 78(17), pp. 2482-2484.
27. Scheffler, D. R., and Zukas, J. A., 2000, "Practical Aspects of Numerical Simulation of Dynamic Events: Material Interfaces," Int. J. Impact Eng., 24, pp. 821-842.
28. Espinosa, H. D., Dwivedi, S., and Lu, H.-C., 2000, "Modeling Impact Induced Delamination of Woven Fiber Reinforced Composites with Contact/Cohesive Laws," Comput. Methods Appl. Mech. Eng., 183(3-4), pp. 259-290.