Failure analysis of tungsten coated polysilicon micromachined microengines

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4180, Issue , 2000, Pages 49-57

  Walraven, Jeremy A ^a   Mani, Seethambal S ^a   Fleming, James G ^a   Headley, Thomas J ^a   Kotula, Paul G ^a   Pimentel, Alejandro A ^a   Rye, Michael J ^a   Tanner, Danelle M ^a   Smith, Norman F ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLOGRAPHY; ELECTRON ENERGY LOSS SPECTROSCOPY; FAILURE ANALYSIS; FRICTION; INTERFACES (MATERIALS); ION BEAMS; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN;

FOCUSED ION BEAMS (FIB); TUNGSTEN COATED POLYSILICON MICROENGINES;

MICROELECTROMECHANICAL DEVICES;

EID: 0034542578     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.395708     Document Type: Conference Paper

References (19)