Schottky-ohmic transition in nickel silicide/SiC-4H system: The effect of non uniform Schottky barrier

Materials Science Forum

Volumn 457-460, Issue II, 2004, Pages 861-864

  La Via, F ^a   Roccaforte, F ^a   Raineri, V ^a   Mauceri, M ^b   Ruggiero, A ^c   Musumeci, P ^c   Calcagno, L ^c  

^a CNR   (Italy)

^b Epitaxial Technology Center   (Italy)

^c UNIVERSITY OF CATANIA   (Italy)

Author keywords

Electrical characterization; Nickel silicide; Ohmic contact; Schottky

Indexed keywords

ELECTRON ENERGY LEVELS; INTERFACES (MATERIALS); MICROSTRUCTURE; NICKEL COMPOUNDS; SCHOTTKY BARRIER DIODES; SECONDARY ION MASS SPECTROMETRY; SILICON CARBIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRICAL CHARACTERIZATION; NICKEL SILICIDE; SCHOTTKY; SCHOTTKY BARRIERS;

OHMIC CONTACTS;

EID: 8744285735     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.457-460.861     Document Type: Conference Paper

References (11)

1. J.N. Su and A.J. Steckl, Inst. Phys. Conf. Ser. Vol. 142 (1996) p. 697
2. L.M. Porter, R.F. Davis: Material Science and Engineering B Vol. 34 (1995) p. 83
3. F. Roccaforte, F. La Via, V. Raineri, L. Calcagno, P. Musumeci, G.G. Condorelli, Appl. Phys. A, Vol 77 (2003), p.827.
4. F. La Via, F. Roccaforte, A. Makhatari, V. Raineri, P. Musumeci and L. Calcagno, Micoelectronic Engineering, Vol. 60 (2002), p.269
5. C.S. Pai, C.M. Hanson and S.S. Lau, J. Appl. Phys. Vol. 57 (1985), p.618
6. I. Ohdomari, S. Sha, H. Aochi, T. Chikyow and S. Suzuki, J. Appl. Phys. Vol. 62 (1987) p.3747
7. L.D. Madsen, E.B. Svedberg, H.H. Radamson, C. Hallin, B. Hjorvarsson, C. Cabral, J.L. Jordan-Sweet and C. Lavoie, Material Science Forum, Vol. 264-268 (1998), p.799
8. S.Y. Han, K.H. Kim, J.K. Kim, H.W. Jang, K.H. Lee, N.K. Kim, E.D. Kim and J.L Lee, Appl. Phys. Lett. Vol. 79 (2001) p.1816
9. S.Y. Han and J.L. Lee, J. of Electroch. Soc. Vol. 149, (2002) p.G189
10. L. Calcagno, E. Zanetti, F. La Via, F. Roccaforte, V. Raineri, S. Libertino, F.Giannazzo, M. Mauceri and P.Musumeci, Material Science Forum, Vol. 433-436 (2002), p.721
11. F. La Via, F. Roccaforte, V. Raineri, M. Mauceri, A. Ruggiero, P. Musumeci, L. Calcagno, A. Castaldini, A. Cavallini, Microelectronic Engineering, in press.