Femtosecond laser micromachining of submicron features

OSA Trends in Optics and Photonics Series

Volumn 88, Issue , 2003, Pages 1972-

  El Bandrawy, M ^a   Gupta, Mool C ^a  

^a OLD DOMINION UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; LASER ABLATION; LASER BEAM EFFECTS; LASER PULSES; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; OPTOELECTRONIC DEVICES; SILICON WAFERS;

GAUSSIAN BEAM; LASER WRITING; NUMERICAL APERTURE; SPECTROSCOPIC MEASUREMENTS;

MICROMACHINING;

EID: 8744278244     PISSN: 10945695     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Xinbing Liu "Ultrafast Lasers as a Versatile Processing Tool" Proceeding of SPIE, 3888, 198-209 (2000).
2. J. Kruger and W. Kautek, "The Femtosecond Pulse Laser: a New Tool for Micromachining" Laser physics, 9, No. 1, 30-40, (1999).
3. Zhao Jianxin, Huettner Bernd and Menschig Arnd, "Micromachining with ultrashort laser pulses" SPIE, 3618, 114-121, (1999).
4. K. Shihoyama, A. Furukawa, Ph. Bardo and A.A. Said, " Micromachining with Ultrafast Lasers" Proceeding of SPIE, 4088, 140143, (2000).
5. Bryan K.A. Ngoi, K. Venkatakrishnan, L.E.N. Lim and B. Tan, "Submicron Micromachining on Silicon Wafer Using Femtosecond Pulse Laser" Journal of Laser applications, 13 No. 1, 41 -43, (2001 ).