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Volumn 457-460, Issue I, 2004, Pages 609-612
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Raman imaging characterization of structural and electrical properties in 4H SiC
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Author keywords
Carrier concentration; Mobility; Raman imaging; Silicon carbide
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Indexed keywords
CARRIER CONCENTRATION;
CARRIER MOBILITY;
CHARACTERIZATION;
MAPPING;
RAMAN SPECTROSCOPY;
SEMICONDUCTOR MATERIALS;
SILICON WAFERS;
RAMAN BANDS;
RAMAN IMAGING;
SPATIAL DISTRIBUTION;
WAFER SCALE;
SILICON CARBIDE;
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EID: 8744270165
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.457-460.609 Document Type: Conference Paper |
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Times cited : (9)
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References (7)
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