Raman Imaging Analysis of SiC Wafers

Materials Science Forum

Volumn 433-436, Issue , 2003, Pages 353-356

  Mermoux, M ^a   Crisci, A ^a   Baillet, F ^a  

^a UNIV GRENOBLE ALPES   (France)

Author keywords

Doping; Micropipe; Raman Imaging; Silicon Carbide; Stress

Indexed keywords

CARRIER CONCENTRATION; DOPING (ADDITIVES); RAMAN SPECTROSCOPY; SILICON WAFERS; STRESSES;

RAMAN IMAGING;

SILICON CARBIDE;

EID: 18744430589     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.433-436.353     Document Type: Conference Paper

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