Ion Beam Figuring and Ion Beam Polishing Production Tools - Processing Technology Included - for Customized Solutions

Optics InfoBase Conference Papers

Volumn , Issue , 2000, Pages 135-137

  Schindler, Axel ^a   Haensel, Thomas ^a   Zeuner, Michael ^b   Seidenkranz, Gerhard ^c  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b Innovative Oberflaechentechnologie GmbH IOT   (Germany)

^c Nano Technologie Leipzig GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

IONS; OPTICAL FIBERS; POLISHING;

CUSTOMIZED SOLUTIONS; ION BEAM FIGURING; ION BEAM POLISHING; PERFORMANCE; PROCESSING TECHNOLOGIES; PRODUCTION TOOLS; SYSTEM SOLUTION; TOOL PROCESSING;

ION BEAMS;

EID: 85053162898     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. thInternational Conference on Production Engineering, Y. Furukawa, Y. Mori, T. Kataoka, eds., (Japanese Society of Precision Engineering Publ. Series No. 3 Tokyo 1999), pp. 243-248
2. D. Flamm, T. Haensel, A. Schindler, A. Nickel and H.-J. Thomas, "Reactive Ion Beam Etching - a Fabrication Process for the Figuring of Precision Aspheric Optical Surfaces in Fused Silica", in Optical Fabrication and Testing, R, Geyl and J. Maxwell, eds., (Proc. EUROPTO Series, Vol. 3739, 1999), pp. 167-175
3. I.F. Stowers, R. Komanduri, E.D. Baird, "Review of precision surface generation process and their potential application to the fabrication of large optical components, in Proc. of the SPIE Vol. 966, 1988) pp. 66-73
4. M. Zeuner, H. Neumann, F. Scholze, A. Hellmich, A., B. Ocker: "A unique ECR broad beam ion source for thin film processing" - PROXIMITY - Balzers Process Systems (BPS) Annual Summary of TFH and Hard Disk Production Technology (1999), 12-16
5. M. Zeuner, H. Neumann, F. Scholze, D. Flamm, M. Tartz, F. Bigl, "Characterization of a modular broad beam ion source" - Plasma Sources Sci. Technol. 7 (1998), 252-267