Self-calibrating five-frame algorithm for phase shifting interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2860, Issue , 1996, Pages 91-98

  Tang, Shouhong ^a  

^a Phase Shift Technology   (United States)

Author keywords

Cane algorithm; Optical metrology; Phase shifting interferometry; Phase measuring algorithm; Self calibration

Indexed keywords

LASER INTERFEROMETRY; PHASE MEASUREMENT;

ERROR SOURCES; INTERFEROGRAMS; MAIN ERROR SOURCES; MEASURING ALGORITHM; OPTICAL METROLOGY; PHASE SHIFTING INTERFEROMETRY; SELF CALIBRATION; SELF-CALIBRATING;

ERRORS;

EID: 85077796984     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.276293     Document Type: Conference Paper

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