메뉴 건너뛰기




Volumn 34, Issue 25, 1995, Pages 5595-5601

Vibration-insensitive interferometer for on-line measurements

Author keywords

Interferometry; Phase shifting; Vibrations

Indexed keywords


EID: 0037905291     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.34.005595     Document Type: Article
Times cited : (24)

References (22)
  • 1
    • 84975531459 scopus 로고
    • ed., Milestone Series (Society of Photo Optical and Instrumentation Engineers, Bellingham, Wash)
    • R. A. Jones, ed., Selected Papers on Computer-Controlled Optical Surfacing, Milestone Series (Society of Photo Optical and Instrumentation Engineers, Bellingham, Wash., 1991), Vol. MS 40.
    • (1991) Selected Papers on Computer-Controlled Optical Surfacing , vol.MS40
    • Jones, R.A.1
  • 2
    • 0025555848 scopus 로고
    • In process metrology for large astronomical mirrors
    • L. R. Baker, P. B. Reid, and G. M. Sanger, eds., Proc. Soc. Photo-Opt. Instrum. Eng
    • M. Küchel and W. Wiedmann, "In process metrology for large astronomical mirrors," in Advanced Optical Manufacturing and Testing, L. R. Baker, P. B. Reid, and G. M. Sanger, eds., Proc. Soc. Photo-Opt. Instrum. Eng. 1333, 281-294 (1990).
    • (1990) Advanced Optical Manufacturing and Testing , vol.1333 , pp. 281-294
    • Küchel, M.1    Wiedmann, W.2
  • 3
    • 77956978378 scopus 로고
    • Phase-measurement interferometry techniques
    • E. Wolf, ed. (Elsevier, New York), Chap. 5
    • K. Creath, "Phase-measurement interferometry techniques," in Progress in Optics, E. Wolf, ed. (Elsevier, New York, 1988), Vol. 26, Chap. 5, pp. 349-383.
    • (1988) Progress in Optics , vol.26 , pp. 349-383
    • Creath, K.1
  • 4
    • 84975624378 scopus 로고
    • Millisecond phase acquisition at video rates
    • D. Colucci and P. Wizinowich, "Millisecond phase acquisition at video rates," Appl. Opt. 31, 5919-5925 (1992).
    • (1992) Appl. Opt , vol.31 , pp. 5919-5925
    • Colucci, D.1    Wizinowich, P.2
  • 6
    • 0001271272 scopus 로고
    • New contra old wavefront measurement concepts for interferometric optical testing
    • R. Józwicki, M. Kujawinska, and L. Salbut, "New contra old wavefront measurement concepts for interferometric optical testing," Opt. Eng. 31, 422-433 (1992).
    • (1992) Opt. Eng , vol.31 , pp. 422-433
    • Józwicki, R.1    Kujawinska, M.2    Salbut, L.3
  • 7
    • 0001433101 scopus 로고
    • Interferogram analysis by a modified sinusoid fitting technique
    • P. L. Ransom and J. V. Kokal, "Interferogram analysis by a modified sinusoid fitting technique," Appl. Opt. 25, 4199-4204 (1986).
    • (1986) Appl. Opt , vol.25 , pp. 4199-4204
    • Ransom, P.L.1    Kokal, J.V.2
  • 8
    • 0019927495 scopus 로고
    • Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
    • M. Takeda, H. Ina, and S. Kobayashi, "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72, 156-160 (1982).
    • (1982) J. Opt. Soc. Am , vol.72 , pp. 156-160
    • Takeda, M.1    Ina, H.2    Kobayashi, S.3
  • 9
    • 0015373101 scopus 로고
    • Direct phase detecting system
    • Y. Ichioka and M. Inuiya, "Direct phase detecting system," Appl. Opt. 11, 1507-1514 (1972).
    • (1972) Appl. Opt , vol.11 , pp. 1507-1514
    • Ichioka, Y.1    Inuiya, M.2
  • 12
    • 0000186699 scopus 로고
    • Analysis of the phase unwrapping algorithm
    • K. Itoh, "Analysis of the phase unwrapping algorithm," Appl. Opt. 21, 2470 (1982).
    • (1982) Appl. Opt , vol.21 , pp. 2470
    • Itoh, K.1
  • 13
    • 84975603082 scopus 로고
    • Phase shifter calibration in phase-shifting interferometry
    • Y. Y. Cheng and J. C. Wyant, "Phase shifter calibration in phase-shifting interferometry," Appl. Opt. 24, 3049-3052 (1985).
    • (1985) Appl. Opt , vol.24 , pp. 3049-3052
    • Cheng, Y.Y.1    Wyant, J.C.2
  • 14
    • 0002834304 scopus 로고
    • Installation et utilisation du comparateur photoelectrique et interferential du Bureau International des Poids et Mésures
    • P. Carré, "Installation et utilisation du comparateur photoelectrique et interferential du Bureau International des Poids et Mésures," Metrologia 2, 13-23 (1966).
    • (1966) Metrologia , vol.2 , pp. 13-23
    • Carré, P.1
  • 15
    • 84975597908 scopus 로고
    • Linear approximation for measurement errors in phase shifting interferometry
    • J. van Wingerden, H. J. Frankena, and C. Smorenburg, "Linear approximation for measurement errors in phase shifting interferometry," Appl. Opt. 30, 2718-2729 (1991).
    • (1991) Appl. Opt , vol.30 , pp. 2718-2729
    • van Wingerden, J.1    Frankena, H.J.2    Smorenburg, C.3
  • 17
    • 0023365464 scopus 로고
    • Image resolution limits resulting from mechanical vibrations
    • D. Wulich and N. S. Kopeika, "Image resolution limits resulting from mechanical vibrations," Opt. Eng. 26, 529-533 (1987).
    • (1987) Opt. Eng , vol.26 , pp. 529-533
    • Wulich, D.1    Kopeika, N.S.2
  • 18
    • 0040253246 scopus 로고
    • Twyman Green interferometer
    • D. Malacara, ed. (Wiley, New York)
    • D. Malacara, "Twyman Green interferometer," in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978), pp. 47-76.
    • (1978) Optical Shop Testing , pp. 47-76
    • Malacara, D.1
  • 19
    • 0038618292 scopus 로고
    • Null tests using compensators
    • D. Malacara, ed. (Wiley, New York)
    • A. Offner, "Null tests using compensators," in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1978), pp. 439-458.
    • (1978) Optical Shop Testing , pp. 439-458
    • Offner, A.1
  • 20
    • 0000658171 scopus 로고
    • Testing aspheric surfaces using multiple annular interferograms
    • M. Melozzi, L. Pezzati, and M. Mazzoni, "Testing aspheric surfaces using multiple annular interferograms," Opt. Eng. 32, 1073-1079 (1993).
    • (1993) Opt. Eng , vol.32 , pp. 1073-1079
    • Melozzi, M.1    Pezzati, L.2    Mazzoni, M.3
  • 21
    • 0028192727 scopus 로고
    • Phase-shifting errors in interferometric tests with high-numerical-aperture reference surfaces
    • K. Creath and P. Hariharan, "Phase-shifting errors in interferometric tests with high-numerical-aperture reference surfaces," Appl. Opt. 33, 24-25 (1994).
    • (1994) Appl. Opt , vol.33 , pp. 24-25
    • Creath, K.1    Hariharan, P.2
  • 22
    • 0026979922 scopus 로고
    • Interferometric testing of annular apertures
    • L. R. Baker, ed., Proc. Soc. Photo-Opt. Instrum. Eng
    • M. Melozzi and L. Pezzati, "Interferometric testing of annular apertures," in Specification and Measurement of Optical Systems, L. R. Baker, ed., Proc. Soc. Photo-Opt. Instrum. Eng. 1781, 241-248 (1992).
    • (1992) Specification and Measurement of Optical Systems , vol.1781 , pp. 241-248
    • Melozzi, M.1    Pezzati, L.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.