A low cost angular rate sensor in Si-surface micromachining technology for automotive application

SAE Technical Papers

Volumn , Issue , 1999, Pages

  Thomae, A ^a   Schellin, R ^a   Lang, M ^a   Bauer, W ^a   Mohaupt, J ^a   Bischopink, G ^a   Tanten, L ^a   Baumann, H ^a   Emmerich, H ^a   Pinter S ^a   Marek, J ^a   Funk, K ^a   Lorenz, G ^a   Neul, R ^a  

^a ROBERT BOSCH GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; SURFACE MICROMACHINING;

ANGULAR RATE SENSORS; AUTOMOTIVE APPLICATIONS; CONSERVATION LAW; ELECTROSTATICALLY DRIVEN; NAVIGATION CONTROLS; OSCILLATING DISKS; SILICON GYROSCOPES; VACUUM CONDITION;

SILICON WAFERS;

EID: 85072413316     PISSN: 01487191     EISSN: 26883627     Source Type: Journal    
DOI: 10.4271/1999-01-0931     Document Type: Conference Paper

References (7)

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